Application of PVD technique to the fabrication of erbium doped ZrF<sub>4</sub>-based glass ceramic for optical amplification

Brigitte Boulard; Olivier Péron; Alessandro Chiasera; Maurizio Ferrari; Yoann Jestin

doi:10.1117/12.662631

20 April 2006 Application of PVD technique to the fabrication of erbium doped ZrF₄-based glass ceramic for optical amplification

Brigitte Boulard, Olivier Péron, Alessandro Chiasera, Maurizio Ferrari, Yoann Jestin

Author Affiliations +

Proceedings Volume 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits; 61831L (2006) https://doi.org/10.1117/12.662631
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

This paper presents the first optical and spectroscopic characterization of zirconium based fluoride planar waveguides ZE (ZrF₄-ErF₃) and ZLE (ZrF₄-LaF₃-ErF₃) that have been fabricated by Physical Vapor Deposition (PVD) in dual evaporation configuration [1]. Transparent thin films have been obtained by adjusting vaporization temperature, composition of the ZrF₄-based glass and the LaF₃-ErF₃ batch. In order to improve resistance to moisture, a low refractive index (~1.32) KAlF₄ cladding has also been deposited. Infrared spectrum of the waveguides has confirmed the protecting role of the cladding layer for the active layer regarding hydrolysis. Luminescence measurements on waveguide samples have shown promising properties compared with the bulk samples, indicating that this system may be suitable for ceramization like in bulk configuration [2-3].

Citation Download Citation

Brigitte Boulard, Olivier Péron, Alessandro Chiasera, Maurizio Ferrari, and Yoann Jestin "Application of PVD technique to the fabrication of erbium doped ZrF₄-based glass ceramic for optical amplification", Proc. SPIE 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, 61831L (20 April 2006); https://doi.org/10.1117/12.662631

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