Laser micromachining of hybrid sol-gels: application to fabrication of micro-optical elements

Estelle Clauss; Jean-Luc Rehspringer; Loïc Mager; Alain Fort; Joël Fontaine

doi:10.1117/12.663621

17 April 2006 Laser micromachining of hybrid sol-gels: application to fabrication of micro-optical elements

Estelle Clauss, Jean-Luc Rehspringer, Loïc Mager, Alain Fort, Joël Fontaine

Proceedings Volume 6190, Solid State Lasers and Amplifiers II; 61901B (2006) https://doi.org/10.1117/12.663621
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

We have prepared an organic/inorganic hybrid using sol-gel process. The material exhibits thermal, mechanical and optical properties well adapted to the patterning by laser micromachining. We have achieved the fabrication of optical elements by this mean validating the process at micrometric scale. Optical waveguides have been fabricated in 3-4 micrometer thick hybrid sol-gel films deposited by spin coating on borosilicate glass substrates. Here laser ablation is used to remove matter on both sides of the waveguide core. The laser micromachining of hybrid sol-gel is also adapted to the fabrication of multilevel diffractive optical elements. Indeed, the ablation depth can be precisely controlled by the fluence of the laser and/or the number of pulses. This study demonstrates that laser micromachining of hybrid sol-gels permits the fast fabrication of effective optical devices, making this process well adapted to rapid prototyping or fabrication of masters.

Citation Download Citation

Estelle Clauss, Jean-Luc Rehspringer, Loïc Mager, Alain Fort, and Joël Fontaine "Laser micromachining of hybrid sol-gels: application to fabrication of micro-optical elements", Proc. SPIE 6190, Solid State Lasers and Amplifiers II, 61901B (17 April 2006); https://doi.org/10.1117/12.663621

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