Lightweight instrument mirrors from single-crystal silicon

Vincent T. Bly; Maria D. Nowak; David O. Moore

doi:10.1117/12.672210

14 June 2006 Lightweight instrument mirrors from single-crystal silicon

Vincent T. Bly, Maria D. Nowak, David O. Moore

Proceedings Volume 6265, Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter; 62652O (2006) https://doi.org/10.1117/12.672210
Event: SPIE Astronomical Telescopes + Instrumentation, 2006, Orlando, Florida , United States

Abstract

We describe a process for fabricating lightweight mirrors from single crystal silicon. We also report ambient and cryogenic test results on a variety of mirrors made by this process. Each mirror is a monolithic structure from a single crystal of silicon. Masses are typically 1/3rd to 1/4th that of an equal diameter solid quartz mirror. We avoid print through of the supporting structure by lightweighting after the optical surface has been formed. Because of the extraordinary homogeneity of single crystal silicon, distortion of the optical surface by the lightweighting process is negligible for most applications (<1/40th wave RMS @ 633nm). This homogeneity also accounts for the near zero distortion at cryogenic temperatures.

Citation Download Citation

Vincent T. Bly, Maria D. Nowak, and David O. Moore "Lightweight instrument mirrors from single-crystal silicon", Proc. SPIE 6265, Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter, 62652O (14 June 2006); https://doi.org/10.1117/12.672210

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available