Nonlinearity error separation and self-correction methods for time grating displacement sensor

Xiaokang Liu; Donglin Peng; Xianquan Wang; Wei Yang

doi:10.1117/12.715250

25 October 2006 Nonlinearity error separation and self-correction methods for time grating displacement sensor

Xiaokang Liu, Donglin Peng, Xianquan Wang, Wei Yang

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 628006 (2006) https://doi.org/10.1117/12.715250
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

A novel type of displacement sensor named time grating is introduced for measuring space with time. Multi-position probes measuring method is used to separate the non-linearity error of time grating, and Fourier series harmonic wave correction method is proposed to correct the error by software. Experiment results coming out from applications conform the remarkable effectiveness of these methods. A time grating displacement sensor with accuracy of ±0.8" is developed. Test results show that high-precision measurement is achieved without high-precision manufacture. The realization of error self-correction endows time grating sensor with intelligence.

Citation Download Citation

Xiaokang Liu, Donglin Peng, Xianquan Wang, and Wei Yang "Nonlinearity error separation and self-correction methods for time grating displacement sensor", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628006 (25 October 2006); https://doi.org/10.1117/12.715250

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