Surface detection based on single fringe pattern analysis

Tingrui Liu; Ailing Gong; Yongrui Zhao; Guangqing Chen

doi:10.1117/12.716196

13 October 2006 Surface detection based on single fringe pattern analysis

Tingrui Liu, Ailing Gong, Yongrui Zhao, Guangqing Chen

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 628021 (2006) https://doi.org/10.1117/12.716196
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

The optical surface metrology based on interference pattern analysis has been one of the study subjects that draw people's attention for a long time. The paper illustrated a study that improved FFT precision by revising exterpolation algorithm of single interference pattern, simulated different Spatial Carrier Phase Shift (SCPS) algorithms, on the basis of correlative literature, and analyzed error contrast. Finally, the paper established FFT, revised 5-point algorithm and N-point algorithm as real-time analysis approaches of single interference pattern.

Citation Download Citation

Tingrui Liu, Ailing Gong, Yongrui Zhao, and Guangqing Chen "Surface detection based on single fringe pattern analysis", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628021 (13 October 2006); https://doi.org/10.1117/12.716196

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