High-sensitive MEMS acoustic sensor using PMN-PT single-crystal diaphragm

Sung Q Lee; Hae Jin Kim; Kang Ho Park; Yong K. Hong; Kee S. Moon

doi:10.1117/12.686007

19 October 2006 MEMS acoustic sensor using PMN-PT single-crystal diaphragm

Sung Q Lee, Hae Jin Kim, Kang Ho Park, Yong K. Hong, Kee S. Moon

Proceedings Volume 6374, Optomechatronic Actuators, Manipulation, and Systems Control; 637409 (2006) https://doi.org/10.1117/12.686007
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

The MEMS (micro-electro-mechanical systems) microphone enables the manufacturing of small mechanical components on the surface of a silicon wafer. The MEMS microphones are less susceptible to vibration because of the smaller diaphragm mass and an excellent candidate for chip-scale packaging. The PMN-PT materials itself exhibit extremely high piezoelectric coefficients and other desirable properties for an acoustic sensor. In this paper, we present a piezoelectric MEMS microphone based on PMN-PT single crystal diaphragm. The fabrication process including dry etching conditions and scale-factored prototype is presented. In particular, this paper introduces the design of a PMN-PT single crystal diaphragm with interdigitated electrode.

Citation Download Citation

Sung Q Lee, Hae Jin Kim, Kang Ho Park, Yong K. Hong, and Kee S. Moon "MEMS acoustic sensor using PMN-PT single-crystal diaphragm", Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 637409 (19 October 2006); https://doi.org/10.1117/12.686007

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available