Paper
2 October 2006 Design and development of high quantum efficiency large area UV focal plane arrays for photon counting applications
E. James Egerton, Ashok K. Sood, Robert A. Bell, Yash R. Puri, Jacob Roginsky, Melville P. Ulmer, Bruce W. Wessels, Timothy Cook
Author Affiliations +
Proceedings Volume 6389, Active and Passive Optical Components for Communications VI; 63890R (2006) https://doi.org/10.1117/12.692774
Event: Optics East 2006, 2006, Boston, Massachusetts, United States
Abstract
In this paper we will present innovative design approach for UV Focal Plane Array for Photon Counting Applications. This Focal Plane includes the building a large area silicon micro-channel plate (MCP) using GaN photocathode. In this paper, we will present the design and simulation of silicon micro-channel plate with GaN photocathode with large area array with 2 micron pores and 3 micron pitch. We will also present results for the ICP-RIE process to fabricate 2 micron pores, and Growth of high conductivity GaN photocathodes using MOCVD to produce 40% QE. We will also discuss approaches for development of readout architecture and circuit for Silicon based MCP 4096x4096 UV FPA. The readout architecture scheme uses a series of charge sensitive amplifiers (CSA) to boost the charge received on each anode. The signal from each CSA is then passed into a shaping amplifier (SA) that produces a smooth waveform. The peak of the smoothed waveform is captured by a sample and hold (S/H) circuit that holds the signal until an analog to digital (A/D) converter can sample it. Details of the ROIC circuit will be presented.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. James Egerton, Ashok K. Sood, Robert A. Bell, Yash R. Puri, Jacob Roginsky, Melville P. Ulmer, Bruce W. Wessels, and Timothy Cook "Design and development of high quantum efficiency large area UV focal plane arrays for photon counting applications", Proc. SPIE 6389, Active and Passive Optical Components for Communications VI, 63890R (2 October 2006); https://doi.org/10.1117/12.692774
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KEYWORDS
Silicon

Gallium nitride

Etching

Ultraviolet radiation

Microchannel plates

Staring arrays

Photon counting

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