In-plane photonic transduction for microcantilever sensor arrays

Gregory P. Nordin; Jong Wok Noh; Seunghyun Kim

doi:10.1117/12.701384

12 February 2007 In-plane photonic transduction for microcantilever sensor arrays

Gregory P. Nordin, Jong Wok Noh, Seunghyun Kim

Proceedings Volume 6447, Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV; 64470J (2007) https://doi.org/10.1117/12.701384
Event: SPIE BiOS, 2007, San Jose, California, United States

Abstract

Microcantilevers show significant promise in sensing minute quantities of chemical and biological analytes in vapor and liquid media. Much of the reported work on microcantilever sensors has made use of single functionalized microcantilevers, usually derived from commercially available atomic force microscope (AFM) cantilevers. However, arrays with hundreds to thousands of microcantilevers on a single chip are required to create sophisticated, broad spectrum chemical and biological sensors in which individual microcantilevers have different bio- or chemoselective coatings. Unfortunately, the most sensitive microcantilever readout mechanisms (such as laser beam reflection as used in atomic force microscopy) are not readily scalable to large arrays. We therefore introduce a new microcantilever transduction mechanism for silicon-on-insulator (SOI) microcantilevers that is designed to scale to large arrays while maintaining a very compact form factor and high sensitivity. This mechanism is based on in-plane photonic transduction of microcantilever deflection in which the microcantilever itself forms a single mode rib waveguide. Light from the end of the microcantilever is directed across a small gap to an asymmetric receiving waveguide with two outputs that enables differential detection of microcantilever deflection. Initial noise and optical power budget calculations indicate that deflection sensitivities in the 10's of picometer range should be achievable.

Citation Download Citation

Gregory P. Nordin, Jong Wok Noh, and Seunghyun Kim "In-plane photonic transduction for microcantilever sensor arrays", Proc. SPIE 6447, Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV, 64470J (12 February 2007); https://doi.org/10.1117/12.701384

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available