Fabrication and characterization of ZnO nanorods by pulsed laser deposition method through catalyst-free process

Ryo Nishimura; Tatsunori Sakano; Takeshi Okato; Minoru Obara

doi:10.1117/12.706278

13 March 2007 Fabrication and characterization of ZnO nanorods by pulsed laser deposition method through catalyst-free process

Ryo Nishimura, Tatsunori Sakano, Takeshi Okato, Minoru Obara

Author Affiliations +

Proceedings Volume 6458, Photon Processing in Microelectronics and Photonics VI; 645817 (2007) https://doi.org/10.1117/12.706278
Event: Lasers and Applications in Science and Engineering, 2007, San Jose, California, United States

Abstract

The ZnO nanorod possesses large surface area, high aspect ratio and quantum confinement effect. Therefore, the ZnO nanorod would be a candidate for a gas sensor, dye-sensitized solar cell, etc. For device applications, it is very important to control the growth of ZnO nanorods. Pulsed-laser deposition (PLD) is an effective method to grow ZnO nanostructures. In this paper, we have fabricated the ZnO nanorods on Si substrate through a two-step process without a metal catalyst. As for a first step, ZnO powder dispersed on Si substrate is thermally annealed in order to fabricate ZnO seed layer. The seed acts as a catalyst of the ZnO nanorod growth, and is found to be zinc silicate (112) by XRD measurement. Secondly, ZnO is deposited on the seed layer by PLD at an argon pressure of 10^-2 Torr. The length of nanorods is up to 4 μm with a typical diameter of 100 nm. The CL emission spectra are observed and the existence of defects within the ZnO nanorods has been identified. By controlling the growth parameters, high-quality nanorods without defects were fabricated by this two-step PLD method.

Citation Download Citation

Ryo Nishimura, Tatsunori Sakano, Takeshi Okato, and Minoru Obara "Fabrication and characterization of ZnO nanorods by pulsed laser deposition method through catalyst-free process", Proc. SPIE 6458, Photon Processing in Microelectronics and Photonics VI, 645817 (13 March 2007); https://doi.org/10.1117/12.706278

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