TEM investigation of laser-induced periodic surface structures on polymer surfaces

Úna Prendergast; Sylwester Kudzma; Richard Sherlock; Claire O'Connell; Thomas Glynn

doi:10.1117/12.699999

13 March 2007 TEM investigation of laser-induced periodic surface structures on polymer surfaces

Úna Prendergast, Sylwester Kudzma, Richard Sherlock, Claire O'Connell, Thomas Glynn

Proceedings Volume 6458, Photon Processing in Microelectronics and Photonics VI; 64581V (2007) https://doi.org/10.1117/12.699999
Event: Lasers and Applications in Science and Engineering, 2007, San Jose, California, United States

Abstract

Laser Induced Periodic Surface Structures (LIPSS) may have numerous applications, ranging from biomaterial applications to LCDs, microelectronic fabrication and photonics. However, in order to control the development of these structures for their particular application, it is necessary to understand how they are generated. We report our work on investigating the melting that occurs during LIPSS formation. LIPSS were generated on three polymer surfaces - polyethylene terephthalate (PET), amorphous polycarbonate (APC) and oriented crystalline polycarbonate (OPC) - which were irradiated with a polarized ArF excimer laser (193 nm) beam with fluences between 3 and 5 mJ/cm². The structures were imaged using a Transmission Electron Microscope (TEM), which facilitated investigation of changes in the polymer structures and consequently the depth of the melt zone that accompanies LIPSS generation. We also present theoretical calculations of the temperature-depth profile due to the interaction of the low fluence 193 nm laser beam with the polymer surfaces and compare these calculations with our experimental results.

Citation Download Citation

Úna Prendergast, Sylwester Kudzma, Richard Sherlock, Claire O'Connell, and Thomas Glynn "TEM investigation of laser-induced periodic surface structures on polymer surfaces", Proc. SPIE 6458, Photon Processing in Microelectronics and Photonics VI, 64581V (13 March 2007); https://doi.org/10.1117/12.699999

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