Verification of thin film processes in a virtual fabrication environment

T. Schmidt; D. Ortloff; J. Popp; K. Hahn; R. Brück; A. Hössinger

doi:10.1117/12.700379

7 March 2007 Verification of thin film processes in a virtual fabrication environment

T. Schmidt, D. Ortloff, J. Popp, K. Hahn, R. Brück, A. Hössinger

Proceedings Volume 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII; 64620G (2007) https://doi.org/10.1117/12.700379
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Thin film fabrication processes for MEMS are characterized by a variety of different process technologies and materials. Unlike in microelectronics the MEMS fabrication process is in most cases application specific and therefore integral part of the application design. Discovering the correct combination of process steps, materials and process parameters usually requires many expensive and time consuming experiments. This paper presents a new software system that supports the MEMS device and process designers in managing their process knowledge and in verifying their fabrication processes in virtual fabrication environment, thus reducing the number of real world experiments to a minimum.

Citation Download Citation

T. Schmidt, D. Ortloff, J. Popp, K. Hahn, R. Brück, and A. Hössinger "Verification of thin film processes in a virtual fabrication environment", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620G (7 March 2007); https://doi.org/10.1117/12.700379

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