Fabrication of micromechanical and microoptical systems by two-photon polymerization

Carsten Reinhardt; A. Ovsianikov; Sven Passinger; Boris N. Chichkov

doi:10.1117/12.700668

22 January 2007 Fabrication of micromechanical and microoptical systems by two-photon polymerization

Carsten Reinhardt, A. Ovsianikov, Sven Passinger, Boris N. Chichkov

Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 64660M (2007) https://doi.org/10.1117/12.700668
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

The recently developed two-photon polymerisation technique is used for the fabrication of two- and three-dimensional structures in photosensitive inorganic-organic hybrid material (ORMOCER), in SU8 , and in positive tone resist with resolutions down to 100nm. In this contribution we present applications of this powerful technology for the realization of micromechanical systems and microoptical components. We will demonstrate results on the fabrication of complex movable three-dimensional micromechanical systems and microfluidic components which cannot be realized by other technologies. This approach of structuring photosensitive materials also provides unique possibilities for the fabrication of different microoptical components such as arbitrary shaped microlenses, microprisms, and 3D-photonic crystals with high optical quality.

Citation Download Citation

Carsten Reinhardt, A. Ovsianikov, Sven Passinger, and Boris N. Chichkov "Fabrication of micromechanical and microoptical systems by two-photon polymerization", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660M (22 January 2007); https://doi.org/10.1117/12.700668

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