Miniaturized self-adaptive tuning of MEMS gyroscope for space

Didier Keymeulen; Michael I. Ferguson; Luke Breuer; Chris Peay; Boris Oks; Yen Cheng; Dennis Kim; Eric MacDonald; David Foor; Richard Terrile; Nazeeh Arenki; Karl Yee

doi:10.1117/12.723605

3 May 2007 Miniaturized self-adaptive tuning of MEMS gyroscope for space

Didier Keymeulen, Michael I. Ferguson, Luke Breuer, Chris Peay, Boris Oks, Yen Cheng, Dennis Kim, Eric MacDonald, David Foor, Richard Terrile, Nazeeh Arenki, Karl Yee

Author Affiliations +

Proceedings Volume 6556, Micro (MEMS) and Nanotechnologies for Defense and Security; 655613 (2007) https://doi.org/10.1117/12.723605
Event: Defense and Security Symposium, 2007, Orlando, Florida, United States

Abstract

We propose a tuning method for Micro-Electro-Mechanical Systems (MEMS) gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. We present the results of an experiment to determine the speed and efficiency of an evolutionary algorithm applied to electrostatic tuning of MEMS micro gyros. The MEMS gyro used in this experiment is a pyrex post resonator gyro (PRG) in a closed-loop control system. A measure of the quality of tuning is given by the difference in resonant frequencies, or frequency split, for the two orthogonal rocking axes. The current implementation of the closed-loop platform is able to measure and attain a relative stability in the sub-millihertz range, leading to a reduction of the frequency split to less than 100 mHz.

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Didier Keymeulen, Michael I. Ferguson, Luke Breuer, Chris Peay, Boris Oks, Yen Cheng, Dennis Kim, Eric MacDonald, David Foor, Richard Terrile, Nazeeh Arenki, and Karl Yee "Miniaturized self-adaptive tuning of MEMS gyroscope for space", Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 655613 (3 May 2007); https://doi.org/10.1117/12.723605

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KEYWORDS

Gyroscopes

Microelectromechanical systems

Electrodes

Control systems

Field programmable gate arrays

Digital signal processing

Genetic algorithms

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