DLC/TiNi microcage for biopsy applications

Y. Q. Fu; J. K. Luo; S. Ong; S. Zhang; A. J. Flewitt; W. I. Milne

doi:10.1117/12.721564

15 May 2007 DLC/TiNi microcage for biopsy applications

Y. Q. Fu, J. K. Luo, S. Ong, S. Zhang, A. J. Flewitt, W. I. Milne

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65891C (2007) https://doi.org/10.1117/12.721564
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

A TiNi/diamond-like-carbon (DLC) microcage for biological application has been designed, fabricated and characterized. A compressively stressed DLC film with TiNi pattern on top lifts the fingers upwards once they are released from the substrate, and the microcage can be closed through shape memory effect of top TiNi film with temperature below 80°C. Further heating above 100°C, the gradual opening of the microcage can be obtained due to thermal bimorph effect. The biocompatibility of both the TiNi and DLC films has been proved using a cell-culture method.

Citation Download Citation

Y. Q. Fu, J. K. Luo, S. Ong, S. Zhang, A. J. Flewitt, and W. I. Milne "DLC/TiNi microcage for biopsy applications", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65891C (15 May 2007); https://doi.org/10.1117/12.721564

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