Physical modeling of a highly sensitive linear MOS sensor for 2D detection of magnetic fields

Ali Abou-Elnour; Ossama Abo-Elnor; Mohamed Y. Essam; M. Marzouk Ibrahim

doi:10.1117/12.722107

31 May 2007 Physical modeling of a highly sensitive linear MOS sensor for 2D detection of magnetic fields

Ali Abou-Elnour, Ossama Abo-Elnor, Mohamed Y. Essam, M. Marzouk Ibrahim

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65891P (2007) https://doi.org/10.1117/12.722107
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

In the present work, a rigorous two-dimensional physical simulator is developed to characterize the operation and to optimize the structure of a highly sensitive linear 2D MOSFET magnetic sensor. The magnetic field equation and the carrier transport equations are efficiently coupled and accurately solved to determine the effects of external applied magnetic field on the electrical characteristics of the MOSFET based sensor. The accuracy of the present simulator is tested for different device and circuit parameters to allow the use of it as an efficient CAD tool to fully characterize smart two-directions MOSFET magnetic sensor.

Citation Download Citation

Ali Abou-Elnour, Ossama Abo-Elnor, Mohamed Y. Essam, and M. Marzouk Ibrahim "Physical modeling of a highly sensitive linear MOS sensor for 2D detection of magnetic fields", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65891P (31 May 2007); https://doi.org/10.1117/12.722107

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