Derivation of quasi-parallel glass plate parameters tested in a Fizeau interferometer

Adam Styk; Krzysztof Patorski

doi:10.1117/12.726141

18 June 2007 Derivation of quasi-parallel glass plate parameters tested in a Fizeau interferometer

Adam Styk, Krzysztof Patorski

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66161W (2007) https://doi.org/10.1117/12.726141
Event: Optical Metrology, 2007, Munich, Germany

Abstract

The paper deals with a common problem in measuring surface flatness of transparent quasi-parallel plates in a Fizeau interferometer. The beam reflected from the rear surface leads to a complicated interferogram intensity distribution. The application of phase shifting for the plate front surface flatness determination becomes ineffective. We propose a new computation approach to suppress spurious modulations. First we find a two-beam-like interference pattern relevant to plate thickness variations using either temporal or spatial phase shifting. Its distribution is calculated using the Hilbert transform. The residual spherical aberration of the illuminating beam and the shape of the reference flat (determined by an absolute flatness testing conducted with the same interferometer) are subtracted from the plate thickness distribution. In this way the shape of the front surface is obtained. Numerical studies are complemented by experimental results.

Citation Download Citation

Adam Styk and Krzysztof Patorski "Derivation of quasi-parallel glass plate parameters tested in a Fizeau interferometer", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66161W (18 June 2007); https://doi.org/10.1117/12.726141

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