Phase only SLM as a reference element in Twyman-Green laser interferometer for MEMS measurement

Jacek Kacperski; Malgorzata Kujawinska

doi:10.1117/12.726214

18 June 2007 Phase only SLM as a reference element in Twyman-Green laser interferometer for MEMS measurement

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66163E (2007) https://doi.org/10.1117/12.726214
Event: Optical Metrology, 2007, Munich, Germany

Abstract

The active Twyman-Green laser interferometer for MEMS measurement equipped with Spatial Light Modulator (SLM) as a reference element is reported. The SLM is electrically addressed, reflective (made in Liquid Crystal on Silicone technology) and phase-only device which allows to actively shape of the reference beam wavefront in the interferometer. The proper use of the SLM in interferometric MEMS measurement is possible after opto-mechanical modification of the interferometer, performed calibration procedures and special interferogram processing. All these aspects are described. The use of such device benefits extension of measurement range and simplification testing procedures. Usefulness of the SLM is shown at the examples of active microelements testing. Advantages and disadvantages of SLM application are described and potential of this device for interferometry is discussed.

Citation Download Citation

Jacek Kacperski and Malgorzata Kujawinska "Phase only SLM as a reference element in Twyman-Green laser interferometer for MEMS measurement", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66163E (18 June 2007); https://doi.org/10.1117/12.726214

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