Design and optimization of a novel 2-D optical excited self-resonant microaccelerometer

Yu Liu; Linqing Liao; Guangze Zheng; Guochao Wang; Hongyun Yang; Rui Xu

doi:10.1117/12.783862

9 January 2008 Design and optimization of a novel 2-D optical excited self-resonant microaccelerometer

Yu Liu, Linqing Liao, Guangze Zheng, Guochao Wang, Hongyun Yang, Rui Xu

Proceedings Volume 6794, ICMIT 2007: Mechatronics, MEMS, and Smart Materials; 67943C (2008) https://doi.org/10.1117/12.783862
Event: ICMIT 2007: Mechatronics, MEMS, and Smart Materials, 2007, Gifu, Japan

Abstract

A novel 2-D optical excited self-resonant microaccelerometer is presented. And its optical characteristics are discussed in theory. Based on genetic algorithm, the thickness of the polysilicon microbeam and the height of the vacuum cavity are optimized to obtain the optimum of light transmissivity.

Citation Download Citation

Yu Liu, Linqing Liao, Guangze Zheng, Guochao Wang, Hongyun Yang, and Rui Xu "Design and optimization of a novel 2-D optical excited self-resonant microaccelerometer", Proc. SPIE 6794, ICMIT 2007: Mechatronics, MEMS, and Smart Materials, 67943C (9 January 2008); https://doi.org/10.1117/12.783862

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