Precision microfabrication of AlN and Al2O3 ceramics by femtosecond laser ablation

Sung Hoon Kim; T. Balasubramani; Ik-Bu Sohn; Yong-Chul Noh; Jongmin Lee; Jee Bum Lee; Sungho Jeong

doi:10.1117/12.762701

26 February 2008 Precision microfabrication of AlN and Al₂O₃ ceramics by femtosecond laser ablation

Sung Hoon Kim, T. Balasubramani, Ik-Bu Sohn, Yong-Chul Noh, Jongmin Lee, Jee Bum Lee, Sungho Jeong

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 68791O (2008) https://doi.org/10.1117/12.762701
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

The characteristics of femtosecond laser ablation of AlN and Al₂O₃for precision microfabrication are studied experimentally. Specifically, the process characteristics during femtosecond laser drilling of microholes with sub-100 μm diameter are investigated for varying laser parameters and beam path designs for trepanning. The accumulation of sub-micrometer size particles within the hole is prevented using a blower and vent system. Through process optimization the microdrilling with good hole quality is achieved.

Citation Download Citation

Sung Hoon Kim, T. Balasubramani, Ik-Bu Sohn, Yong-Chul Noh, Jongmin Lee, Jee Bum Lee, and Sungho Jeong "Precision microfabrication of AlN and Al₂O₃ ceramics by femtosecond laser ablation", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68791O (26 February 2008); https://doi.org/10.1117/12.762701

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