Fabrication of nanophotonic structures for information processing

Sean M. Spillane; Qianfan Xu; David A. Fattal; Wei Wu; Pavel Kornilovich; Raymond G. Beausoleil

doi:10.1117/12.764380

6 February 2008 Fabrication of nanophotonic structures for information processing

Sean M. Spillane, Qianfan Xu, David A. Fattal, Wei Wu, Pavel Kornilovich, Raymond G. Beausoleil

Proceedings Volume 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics; 688302 (2008) https://doi.org/10.1117/12.764380
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Nanophotonic structures can be used to dramatically enhance interactions between light and matter. We describe some of our recent progress in fabricating optical nanostructures suitable for both classical and quantum information processing. In particular, we present our progress using nanoimprint lithography, a low cost nanoreplication method, to fabricate low loss photonic crystals.

Citation Download Citation

Sean M. Spillane, Qianfan Xu, David A. Fattal, Wei Wu, Pavel Kornilovich, and Raymond G. Beausoleil "Fabrication of nanophotonic structures for information processing", Proc. SPIE 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, 688302 (6 February 2008); https://doi.org/10.1117/12.764380

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