Reliability of MEMS devices in shock and vibration overload situations

Steffen Kurth; Alexey Shaporin; Karla Hiller; Christian Kaufmann; Thomas Gessner

doi:10.1117/12.763617

18 February 2008 Reliability of MEMS devices in shock and vibration overload situations

Steffen Kurth, Alexey Shaporin, Karla Hiller, Christian Kaufmann, Thomas Gessner

Proceedings Volume 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII; 688409 (2008) https://doi.org/10.1117/12.763617
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

This contribution describes the investigation of the reasons for overload failure and overload reaction based on linear vibration theory by decomposition of the complex reaction into resonant mode reactions and on observation of the reaction. An impulse specific peak deflection (ISPD) is derived as a general characteristic property of a certain shock. It is applicable to predict the mechanical deflection of a certain resonant mode of an arbitrary resonant frequency due to a shock. This is further analyzed and proofed by scanning Laser Doppler interferometer (SLDI) measurement on the example of a Fabry Perot interferometer based tunable infrared filter. The results from ISPD prediction are compared to SLDI measurements and to finite element analysis results.

Citation Download Citation

Steffen Kurth, Alexey Shaporin, Karla Hiller, Christian Kaufmann, and Thomas Gessner "Reliability of MEMS devices in shock and vibration overload situations", Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 688409 (18 February 2008); https://doi.org/10.1117/12.763617

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