Characterization of microresistance welding with electrothermal actuator for microassembly

Chun-Wei Chang; Wensyang Hsu

doi:10.1117/12.765665

18 February 2008 Characterization of microresistance welding with electrothermal actuator for microassembly

Chun-Wei Chang, Wensyang Hsu

Proceedings Volume 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII; 68840G (2008) https://doi.org/10.1117/12.765665
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Optical MEMS devices rely on the micro assembly to achieve re-positioning, such as lifted up micro mirrors and lens and micro resistance welding benefits assembly of optical components. However, the characteristics of micro resistance welding are still unknown. The purpose of this study is to characterize micro resistance welding with electro-thermal actuator for micro assembly. In order to characterize influence of operation parameters on micro resistance welding, important parameters including contact pressure, contact resistance and electrical energy are calibrated. Further, welding strength provide robust join are also measured. The idea of resistance welding is based on generated heat by Ohm's law to melt material. From measured results, contact resistance decreases with increasing contact pressure due to increasing contact area. The stronger welding strength can be achieved at a smaller initial contact resistance which means that a larger clamping force could enhance the welding strength. The maximum welding strength is 74.4 μN at 2.7 ΩFurther, welding energy affects yield significantly. At high welding energy, between 1 to 10 J, the yield can reach 100%. The energy below 0.05 J would not generate adequate heat to weld structure.

Citation Download Citation

Chun-Wei Chang and Wensyang Hsu "Characterization of microresistance welding with electrothermal actuator for microassembly", Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 68840G (18 February 2008); https://doi.org/10.1117/12.765665

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available