ZnO hybrid microcavities grown by plasma assisted molecular beam epitaxy

Ryoko Shimada; Jinqiao Xie; Vitaliy Avrutin; Ümit Özgür; Hadis Morkoç

doi:10.1117/12.762299

15 February 2008 ZnO hybrid microcavities grown by plasma assisted molecular beam epitaxy

Ryoko Shimada, Jinqiao Xie, Vitaliy Avrutin, Ümit Özgür, Hadis Morkoç

Proceedings Volume 6895, Zinc Oxide Materials and Devices III; 68950I (2008) https://doi.org/10.1117/12.762299
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

Strong coupling between the exciton and cavity modes were demonstrated in a bulk ZnO-based hybrid microcavity The hybrid microcavity consisted of a λ-thick bulk ZnO cavity layer sandwiched between a 29 pair Al_0.5Ga_0.5N/GaN bottom distributed Bragg reflector (DBR) and an 8 pair SiO₂/Si₃N₄ top DBR grown by molecular beam epitaxy, metalorganic chemical vapor deposition, and ultra high vacuum plasma-enhanced chemical vapor deposition, respectively. All layer interfaces were sharp and optical reflectivity measurements were performed to characterize the DBRs. The anti-crossing behavior in the polarton dispersion, which indicates the system is in the strong coupling regime was observed in angle-resolved photoluminescence measurements at room temperature, and a vacuum Rabi splitting of ~50 meV in the ZnO-based hybrid microcavity was obtained.

Citation Download Citation

Ryoko Shimada, Jinqiao Xie, Vitaliy Avrutin, Ümit Özgür, and Hadis Morkoç "ZnO hybrid microcavities grown by plasma assisted molecular beam epitaxy", Proc. SPIE 6895, Zinc Oxide Materials and Devices III, 68950I (15 February 2008); https://doi.org/10.1117/12.762299

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