The effects of post-annealing on pulse laser deposition of Zr0.8Sn0.2TiO4 thin film on Si(100)

C. T. Chuang; Ming Chang Shih; M. H. Weng

doi:10.1117/12.814587

3 October 2008 The effects of post-annealing on pulse laser deposition of Zr_0.8Sn_0.2TiO₄thin film on Si(100)

C. T. Chuang, Ming Chang Shih, M. H. Weng

Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71552D (2008) https://doi.org/10.1117/12.814587
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore

Abstract

We demonstrate the pulse laser deposition (PLD) of zirconium tin titanium oxide (Zr0.8,Sn0.2)TiO4 (ZST) thin film on p-type Si (100)substrate by KrF excimer laser at room temperature, and the study of the effects of post-annealing to the optical and dielectric properties of the deposited ZST thin films. Deposition rate of ZST thin film at 0.3 Angstrom/pulse has been achieved with laser fluences of 1500 mJ/cm². Raman spectroscopy, X-ray diffraction (XRD), and scanning electron microscopy (SEM) are used to study the effect of the crystalline properties of the deposited films on process parameters; such as laser fluence and annealing temperature. In addition, UV-Vis spectroscopy is used to characterize the optical properties of the deposited ZST films.

Citation Download Citation

C. T. Chuang, Ming Chang Shih, and M. H. Weng "The effects of post-annealing on pulse laser deposition of Zr_0.8Sn_0.2TiO₄thin film on Si(100)", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71552D (3 October 2008); https://doi.org/10.1117/12.814587

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available