Paper
2 February 2009 Three-dimensional angle measurement based on auto-collimation and moire fringe
Sheng Cai, Shuang Liang, Yan-feng Qiao
Author Affiliations +
Abstract
A method for small three-dimensional (3D) angle measurement based on auto-collimation and moire fringe is proposed and analyzed. A right-angle prism is used as the indicator of angle change. The inclined plane indicates the pitch and yaw angles and roll angle in indicated by the rib which is the intersection of two right-angle sides. Pitch and yaw angles measurement are implemented by auto-collimation based on reticule and roll angle measurement is measured based on moire fringe. Roll angle measurement is separated from pitch and yaw by using two light sources with different frequencies. Any small change of pitch and roll angles will induce the shift of the reticule image after reflecting by inclined plane. And any small roll angle will induce a change in moire fringe width that is generated by scale grating image which is reflected by the prism and index grating. The math model of this method is built up and error analysis is presented. The theoretical calculation results show that the proposed method is feasible and can achieve high accuracy.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sheng Cai, Shuang Liang, and Yan-feng Qiao "Three-dimensional angle measurement based on auto-collimation and moire fringe", Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 716004 (2 February 2009); https://doi.org/10.1117/12.804723
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
3D metrology

Prisms

Photomasks

Error analysis

Objectives

Fringe analysis

Green light emitting diodes

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