Submicron writing by laser irradiation on metal nano-particle dispersed films toward flexible electronics

Akira Watanabe; Mohammod Aminuzzaman; Tokuji Miyashita

doi:10.1117/12.808213

24 February 2009 Submicron writing by laser irradiation on metal nano-particle dispersed films toward flexible electronics

Akira Watanabe, Mohammod Aminuzzaman, Tokuji Miyashita

Author Affiliations +

Proceedings Volume 7202, Laser-based Micro- and Nanopackaging and Assembly III; 720206 (2009) https://doi.org/10.1117/12.808213
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

The requirement for microwiring technology by a wet process has significantly increased recently toward the achievement of printable and flexible electronics. We have developed the metal microwiring with a resolution higher than 1 μm by the laser direct writing technique using Ag and Cu nano-particle-dispersed films as precursors. The technique was applied to the microwiring on a flexible and transparent polymer film. The metallization is caused in a micro-region by focused laser beam, which reduces the thermal damage of the flexible polymer substrate during the metallization process. The laser direct writing technique is based on the efficient and fast conversion of photon energy to thermal energy by direct excitation of the plasmon absorption of a metal nano-particle, which provides Cu microwiring with a low resistivity owing to the inhibition of the surface oxidation of the Cu nano-particle.

Citation Download Citation

Akira Watanabe, Mohammod Aminuzzaman, and Tokuji Miyashita "Submicron writing by laser irradiation on metal nano-particle dispersed films toward flexible electronics", Proc. SPIE 7202, Laser-based Micro- and Nanopackaging and Assembly III, 720206 (24 February 2009); https://doi.org/10.1117/12.808213

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