Characterization of hybrid molding and lithography for SU-8 micro-optical components

Aaron T. Cannistra; Thomas J. Suleski

doi:10.1117/12.813463

24 February 2009 Characterization of hybrid molding and lithography for SU-8 micro-optical components

Proceedings Volume 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II; 720517 (2009) https://doi.org/10.1117/12.813463
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

SU-8 is a very promising material for micro-optics. It is mechanically robust with high thermal and chemical resistance, has high transmission at visible and near-infrared wavelengths, and has relatively high refractive index after curing. While lithographic processing of SU-8 is relatively common, molding of SU-8 requires different processing parameters due to challenges with solvent removal and cross linking. Understanding the effects of the molding process on SU-8 is necessary to optimize performance of molded micro-optical components, and also to enable fabrication of more complex micro-optics through subsequent lithographic processing of molded structures. In this paper, we examine properties of SU-8 as it undergoes the molding process. General characterization of SU-8 shrinkage/expansion is presented, and minimum moldable feature sizes are explored. Solvent content and refractive index as functions of processing parameters are also examined, along with analysis of the SU-8's lithographic properties after undergoing the molding process. These characterizations further enable hybrid combinations of micro-molding and lithographic processing to fabricate complex micro-optics that are difficult or impossible to realize using conventional techniques.

Citation Download Citation

Aaron T. Cannistra and Thomas J. Suleski "Characterization of hybrid molding and lithography for SU-8 micro-optical components", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 720517 (24 February 2009); https://doi.org/10.1117/12.813463

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