In situ measurement of gas diffusion properties of sealing polymers for MEMS packages by an optical gas leak test

Changsoo Jang; Arindam Goswami; Bongtae Han

doi:10.1117/12.810001

9 February 2009 In situ measurement of gas diffusion properties of sealing polymers for MEMS packages by an optical gas leak test

Changsoo Jang, Arindam Goswami, Bongtae Han

Author Affiliations +

Proceedings Volume 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII; 720607 (2009) https://doi.org/10.1117/12.810001
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

A novel inverse approach based on an optical leak test is developed and implemented for in-situ measurement of gas diffusion properties of polymeric seals used in MEMS packages. Cavity pressure evolution during a leak test is documented as a function of time using laser-based interferometry, and the diffusion properties of a polymeric seal are subsequently determined from the measured pressure history. A comprehensive numerical procedure for the inverse analysis is established considering three diffusion regimes that characterize the leak behavior through a polymer seal. The method is demonstrated successfully to determine the helium diffusivity and solubility of the polymeric seal used in a package.

Citation Download Citation

Changsoo Jang, Arindam Goswami, and Bongtae Han "In situ measurement of gas diffusion properties of sealing polymers for MEMS packages by an optical gas leak test", Proc. SPIE 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII, 720607 (9 February 2009); https://doi.org/10.1117/12.810001

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