Design and fabrication of a MEMS mirror for miniature laser projection

René Sanders; Diederik van Lierop; Boudewijn de Jong; Herman Soemers

doi:10.1117/12.807639

23 February 2009 Design and fabrication of a MEMS mirror for miniature laser projection

René Sanders, Diederik van Lierop, Boudewijn de Jong, Herman Soemers

Proceedings Volume 7208, MOEMS and Miniaturized Systems VIII; 72080R (2009) https://doi.org/10.1117/12.807639
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

For miniature laser projection displays the laser beam is swept very fast back and forth with a MEMS mirror. This paper presents an innovative design for such a MEMS mirror. Both the dynamical behavior and manufacturability have been improved. We designed a process based upon industrially proven process steps to accurately control critical parameters and fabricated a mirror consisting of: cantilever beams, out-of-plane support beams and a rhombus shaped enforcement structure. Measurements show a well defined resonant mode of operation at 23.5 kHz while suffering from only little parasitic resonance modes. This mirror can now be mass-produced at low costs.

Citation Download Citation

René Sanders, Diederik van Lierop, Boudewijn de Jong, and Herman Soemers "Design and fabrication of a MEMS mirror for miniature laser projection", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080R (23 February 2009); https://doi.org/10.1117/12.807639

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