Paper
10 February 2009 Optical proximity communication
Ivan Shubin, John E. Cunningham, Xuezhe Zheng, John Simons, Dazeng Feng, Hong Liang, Cheng-Chih Kung, Mehdi Asghari, Ashok V. Krishnamoorthy
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Abstract
We review 10Gb/sec Optical Proximity Communication realized with packaged chips that carry SOI optical waveguides and reflecting mirrors micromachined in silicon. The high precision chip to chip alignment and placement was enabled by a new packaging concept based on the co-integration of pyramidal pit features defined by anisotropic silicon etch and matching high precision micro-spheres. We support this novel packaging approach with measured optical transmission data and discuss the extent of it towards other applications of Proximity Communication.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ivan Shubin, John E. Cunningham, Xuezhe Zheng, John Simons, Dazeng Feng, Hong Liang, Cheng-Chih Kung, Mehdi Asghari, and Ashok V. Krishnamoorthy "Optical proximity communication", Proc. SPIE 7219, Optoelectronic Integrated Circuits XI, 721902 (10 February 2009); https://doi.org/10.1117/12.813415
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Cited by 6 scholarly publications.
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KEYWORDS
Waveguides

Silicon

Optical communications

Etching

Mirrors

Packaging

Signal attenuation

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