Double-swing method used for polishing off-axis aspherical mirrors

Peng Wang; Jun-feng Li; Bin Xuan; Xiao-ping Chen; Shu-mei Song; Ya Chen; Jing-jiang Xie

doi:10.1117/12.830781

20 May 2009 Double-swing method used for polishing off-axis aspherical mirrors

Peng Wang, Jun-feng Li, Bin Xuan, Xiao-ping Chen, Shu-mei Song, Ya Chen, Jing-jiang Xie

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 728203 (2009) https://doi.org/10.1117/12.830781
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Based on the characteristics of off-axis aspherical surface, a new method used for polishing off-axis aspherical mirrors-Double-Swing Method (DSM) is proposed in this paper, and the polishing mechanism of DSM is introduced. The mathematical model of the DSM with steady movement state is established. The movement of this mathematical model is simulated in a programming language; the comparison of simulation effects under different parameters is made. In order to achieve optimal parameters, a high order off-axis rectangle aspherical mirror has been polished by DSM. The final result of profile measurements of 12nm, RMS is achieved. The result indicates that the method is of practice and has even higher working efficiency and precision.

Citation Download Citation

Peng Wang, Jun-feng Li, Bin Xuan, Xiao-ping Chen, Shu-mei Song, Ya Chen, and Jing-jiang Xie "Double-swing method used for polishing off-axis aspherical mirrors", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 728203 (20 May 2009); https://doi.org/10.1117/12.830781

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