Surface reactions of (sub)monolayers of small organic species on oxidized silicon

N. Salingue; D. Lingenfelser; P. Prunici; P. Hess

doi:10.1117/12.821176

28 May 2009 Surface reactions of (sub)monolayers of small organic species on oxidized silicon

N. Salingue, D. Lingenfelser, P. Prunici, P. Hess

Proceedings Volume 7364, Nanotechnology IV; 73640F (2009) https://doi.org/10.1117/12.821176
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

The preparation of (sub)monolayers of small and short-chain organic molecules on oxide-covered silicon is described. The molecular end groups and their chemical reactions were characterized by attenuated total reflection Fourier transform infrared (ATR-FTIR) spectroscopy, spectroscopic ellipsometry (IR-UV), laserinduced desorption of monolayers (LIDOM), X-ray photoelectron spectroscopy (XPS), and contact-angle experiments. Surface species were identified and their reactions were monitored by FTIR analysis of characteristic vibrational modes. This includes bottom-up synthesis of siloxane chains, diverse reactions of double bonds, and specific molecular transformations such as the Diels-Alder reaction. Layer thicknesses could be estimated with a sensitivity of ~0.02 nm and accuracy of ~0.05 nm by oxidation of the hydrocarbons. This was achieved by in situ real-time detection of the corresponding thickness changes by spectroscopic ellipsometry. From time-of-flight (TOF) experiments, which provided the desorption temperature and mass of the emitted species, the thermal stability, chemical transformation, and fragmentation pattern of chemisorbed species could be extracted. To analyze the hydrophilic or hydrophobic nature of functionalized surfaces the surface energy and wettability were determined.

Citation Download Citation

N. Salingue, D. Lingenfelser, P. Prunici, and P. Hess "Surface reactions of (sub)monolayers of small organic species on oxidized silicon", Proc. SPIE 7364, Nanotechnology IV, 73640F (28 May 2009); https://doi.org/10.1117/12.821176

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