Optical testing of large rough aspheric surface using far-infrared interferometer

Yongqian Wu; Yudong Zhang; Fan Wu

doi:10.1117/12.837125

4 August 2009 Optical testing of large rough aspheric surface using far-infrared interferometer

Yongqian Wu, Yudong Zhang, Fan Wu

Proceedings Volume 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications; 73832Y (2009) https://doi.org/10.1117/12.837125
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

An far-infrared interferometer which can test rough surface is presented. It is based on the optical configuration of classical Fizeau interferometer. In addition, the design and system performance of an infrared system is presented. Using the infrared system, the far-infrared interferometer is capable of testing rough aspheric surfaces. The measuring error(RMS) is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.

Citation Download Citation

Yongqian Wu, Yudong Zhang, and Fan Wu "Optical testing of large rough aspheric surface using far-infrared interferometer", Proc. SPIE 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications, 73832Y (4 August 2009); https://doi.org/10.1117/12.837125

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