Sensor and actuator conditioning for multiscale measurement systems on example of confocal microscopy

W. Lyda; J. Zimmermann; A. Burla; J. Regin; W. Osten; O. Sawodny; E. Westkämper

doi:10.1117/12.827534

17 June 2009 Sensor and actuator conditioning for multiscale measurement systems on example of confocal microscopy

W. Lyda, J. Zimmermann, A. Burla, J. Regin, W. Osten, O. Sawodny, E. Westkämper

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 738903 (2009) https://doi.org/10.1117/12.827534
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

Multi-scale measurement systems utilise multiple sensors which differ in resolution and measurement field to pursue an active exploration strategy. The different sensor scales are linked by indicator algorithms for further measurement initiation. A major advantage of this strategy is a reduction of the conflict between resolution, time and field. This reduction is achieved by task specific conditioning of sensors, indicator algorithms and actuators using suitable uncertainty models. This contribution is focused on uncertainty models of sensors and actuators using the example of a prototype multi-scale measurement system. The influence of the sensor parameters, object characteristics and measurement conditions on the measurement reliability is investigated exemplary for the middle-scale sensor, a confocal microscope.

Citation Download Citation

W. Lyda, J. Zimmermann, A. Burla, J. Regin, W. Osten, O. Sawodny, and E. Westkämper "Sensor and actuator conditioning for multiscale measurement systems on example of confocal microscopy", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738903 (17 June 2009); https://doi.org/10.1117/12.827534

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available