Dynamic characterization of a 2-DOF circular resonator-driven vibratory grating scanner with geometric nonlinearity

Yu Du; Guangya Zhou; Fook Siong Chau; Koon Lin Cheo; Qingxin Zhang; Hanhua Feng

doi:10.1117/12.852070

14 April 2010 Dynamic characterization of a 2-DOF circular resonator-driven vibratory grating scanner with geometric nonlinearity

Yu Du, Guangya Zhou, Fook Siong Chau, Koon Lin Cheo, Qingxin Zhang, Hanhua Feng

Author Affiliations +

Proceedings Volume 7522, Fourth International Conference on Experimental Mechanics; 75221S (2010) https://doi.org/10.1117/12.852070
Event: Fourth International Conference on Experimental Mechanics, 2009, Singapore, Singapore

Abstract

A micro-sized 2-DOF grating laser scanner which is made to vibrate in-plane by an electrical comb-driven circular resonator drive is fabricated and tested. The frequency response of the prototype scanner in atmosphere to different driving voltages and the variations of its natural frequency with scanning amplitude are measured. The results are compared with those from finite element simulations using a comprehensive dynamic model, including the effects of geometric nonlinearity of the flexural beams under large deformations. The comparison shows that the predictions made by the developed nonlinear model are generally valid.

Citation Download Citation

Yu Du, Guangya Zhou, Fook Siong Chau, Koon Lin Cheo, Qingxin Zhang, and Hanhua Feng "Dynamic characterization of a 2-DOF circular resonator-driven vibratory grating scanner with geometric nonlinearity", Proc. SPIE 7522, Fourth International Conference on Experimental Mechanics, 75221S (14 April 2010); https://doi.org/10.1117/12.852070

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