Paper
28 December 2010 A novel micro-friction measuring-head using force-feedback compensation
Derek G. Chetwynd, Mohammad S. Alsoufi
Author Affiliations +
Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 754417 (2010) https://doi.org/10.1117/12.885909
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China
Abstract
A novel micro-tribometry system has been developed specifically for investigating whether the limited dynamic response of conventional instruments might hide functionally important materials behaviour. It is based on a universal measuring head, suitable for use with a wide range of specimen stages, that incorporates a relatively stiff elastic sensing element and actively-controlled electromagnetic force actuation in both axes. This paper first reviews the rationale for the new design and then explains the critical design features. Characterization and calibration are discussed: the prototype unit is aimed primarily at use in the 10 - 50 mN, with a bandwidth of at least 100 Hz. The basic operation and capabilities of the micro-tribometer head are presented by means of demonstration experiments on smooth and relatively rough surfaces.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Derek G. Chetwynd and Mohammad S. Alsoufi "A novel micro-friction measuring-head using force-feedback compensation", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754417 (28 December 2010); https://doi.org/10.1117/12.885909
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Cited by 2 scholarly publications.
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KEYWORDS
Actuators

Sensors

Head

Semiconducting wafers

Silicon

Calibration

Microelectromechanical systems

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