Nonlinear mathematical model for a biaxial MOEMS scanning mirror

Yunfei Ma; Wyatt O. Davis; Matt Ellis; Dean Brown

doi:10.1117/12.843084

16 February 2010 Nonlinear mathematical model for a biaxial MOEMS scanning mirror

Yunfei Ma, Wyatt O. Davis, Matt Ellis, Dean Brown

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940B (2010) https://doi.org/10.1117/12.843084
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

In this paper, a nonlinear mathematic model for Microvision's MOEMS scanning mirror is presented. The pixel placement accuracy requirement for scanned laser spot displays translates into a roughly 80dB signal to noise ratio, noise being a departure from the ideal trajectory. To provide a tool for understanding subtle nonidealities, a detailed nonlinear mathematical model is derived, using coefficients derived from physics, finite element analysis, and experiments. Twelve degrees of freedom parameterize the motion of a gimbal plate and a suspended micromirror; a thirteenth is the device temperature. Illustrations of the application of the model to capture subtleties about the device dynamics and transfer functions are presented.

Citation Download Citation

Yunfei Ma, Wyatt O. Davis, Matt Ellis, and Dean Brown "Nonlinear mathematical model for a biaxial MOEMS scanning mirror", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940B (16 February 2010); https://doi.org/10.1117/12.843084

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available