Miniaturized MEMS-based spectrometric sensor for process control and analysis of carbonated beverages

A. Kenda; M. Kraft; A. Tortschanoff; Ch. Wagner; B. Lendl; T. Sandner; H. Schenk

doi:10.1117/12.841957

17 February 2010 Miniaturized MEMS-based spectrometric sensor for process control and analysis of carbonated beverages

A. Kenda, M. Kraft, A. Tortschanoff, Ch. Wagner, B. Lendl, T. Sandner, H. Schenk

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940U (2010) https://doi.org/10.1117/12.841957
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

With MEMS, it became possible to build pocket-sized spectrometers for various spectral ranges, including the near-IR or mid-IR. These systems are highly rugged and can measure spectral changes at ms time resolution or co-add several hundreds of scans to one spectrum achieving adequate signal-to-noise ratios. Two spectrometer systems a scanning grating based spectrometer and a FT-IR spectrometer both based on a micromechanical scanning mirror technology are presented. Furthermore, the focus of this work is on the development of an analyzer for dissolved CO₂ showing the methodology and also first implementation steps towards a sensor solution. CO₂(aq) calibration samples were prepared by different NaHCO₃ concentrations in solution. Spectra and calibration data acquired with both MEMS based spectrometer prototypes are presented.

Citation Download Citation

A. Kenda, M. Kraft, A. Tortschanoff, Ch. Wagner, B. Lendl, T. Sandner, and H. Schenk "Miniaturized MEMS-based spectrometric sensor for process control and analysis of carbonated beverages", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940U (17 February 2010); https://doi.org/10.1117/12.841957

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