Recent advances in expanding the spectral range of MEMS Fabry-Perot filters

Martin Ebermann; Norbert Neumann; Karla Hiller; Elvira Gittler; Marco Meinig; Steffen Kurth

doi:10.1117/12.843441

17 February 2010 Recent advances in expanding the spectral range of MEMS Fabry-Perot filters

Martin Ebermann, Norbert Neumann, Karla Hiller, Elvira Gittler, Marco Meinig, Steffen Kurth

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940V (2010) https://doi.org/10.1117/12.843441
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

First results of a MEMS Fabry-Perot filter (FPF) for the spectral range of 8-11 μm are presented. Broad bandwidth and a low phase dispersion could be achieved by using new dielectric materials with an enhanced refractive index contrast and relatively simple reflector designs with a low number of layers. Different designs of the Bragg reflectors and complete FPF devices have been developed and samples have been fabricated and tested. Especially tilting and in certain cases bowing of the reflectors lowers the finesse of the fabricated filters. The bandwidth of the FPF is in the range of 170- 250 nm and the peak transmittance has been determined to be up to 60 %. Simulation and measurements agree very well if the effect of the defective finesse is taken into considerations.

Citation Download Citation

Martin Ebermann, Norbert Neumann, Karla Hiller, Elvira Gittler, Marco Meinig, and Steffen Kurth "Recent advances in expanding the spectral range of MEMS Fabry-Perot filters", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940V (17 February 2010); https://doi.org/10.1117/12.843441

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