Subpixel scatter in digital micromirror devices

Kenneth D. Fourspring; Zoran Ninkov; John P. Kerekes

doi:10.1117/12.843702

18 February 2010 Subpixel scatter in digital micromirror devices

Kenneth D. Fourspring, Zoran Ninkov, John P. Kerekes

Proceedings Volume 7596, Emerging Digital Micromirror Device Based Systems and Applications II; 75960J (2010) https://doi.org/10.1117/12.843702
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

The DMD™ (Digital Micromirror Device) has become an integral part of the instrumentation for many applications. Prior characterization of this device has been focused on its use in DLP™ (TI Digital Light Processing) projector applications where a collimated wavefront impinges on the DMD. The results of such investigations are not applicable to using DMDs at the focal plane of an optical system where it is used as a slit mask (e.g. in a multi-object spectrometer). In order to study the DMD scattering function in this second case, a subpixel spot scanning system has been assembled. The scattered light collected from this system allowed a subpixel scattering function to be determined for the DMD when illuminated by a converging beam.

Citation Download Citation

Kenneth D. Fourspring, Zoran Ninkov, and John P. Kerekes "Subpixel scatter in digital micromirror devices", Proc. SPIE 7596, Emerging Digital Micromirror Device Based Systems and Applications II, 75960J (18 February 2010); https://doi.org/10.1117/12.843702

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