High-index-contrast subwavelength grating VCSEL

Philippe Gilet; Nicolas Olivier; Philippe Grosse; Karen Gilbert; Alexei Chelnokov; Il-Sug Chung; Jesper Mørk

doi:10.1117/12.840884

5 February 2010 High-index-contrast subwavelength grating VCSEL

Philippe Gilet, Nicolas Olivier, Philippe Grosse, Karen Gilbert, Alexei Chelnokov, Il-Sug Chung, Jesper Mørk

Proceedings Volume 7615, Vertical-Cavity Surface-Emitting Lasers XIV; 76150J (2010) https://doi.org/10.1117/12.840884
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

In this article, we report our results on 980nm high-index-contrast subwavelength grating (HCG) VCSELs for optical interconnection applications. In our structure, a thin undoped HCG layer replaces a thick p-type Bragg mirror. The HCG mirror can feasibly achieve polarization-selective reflectivities close to 100%. The investigated structure consists of a HCG mirror with an underneath λ/4-thick oxide gap, four p-type GaAlAs/GaAs pairs for current spreading, three InGaAs/GaAs quantum wells, and an n-type GaAlAs/GaAs Bragg mirror. The HCG structure was defined by e-beam lithography and dry etching. The current oxide aperture and the oxide gap underneath the HCG were simultaneously formed by the selective wet oxidation process. Compared to air-gap high contrast grating mirrors demonstrated elsewhere, our grating mirrors are particular since they are supported by thinner λ/4 aluminium oxide layer, and thus are mechanically robust and thinner than usual designs. Sub-milliamp threshold currents and single-transverse-mode operation was obtained. A hero device exhibited maximum singlemode output power of more than 4 mW at room temperature and 1 mw at 70°C, which are the highest values ever reported from the HCG structures. These results build a bridge between a standard VCSEL and a hybrid laser on silicon, making them of potential use for the realization of silicon photonics.

Citation Download Citation

Philippe Gilet, Nicolas Olivier, Philippe Grosse, Karen Gilbert, Alexei Chelnokov, Il-Sug Chung, and Jesper Mørk "High-index-contrast subwavelength grating VCSEL", Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 76150J (5 February 2010); https://doi.org/10.1117/12.840884

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