Paper
5 February 2010 Thermal resistance reduction in 670 nm vertical-cavity surface-emitting lasers
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Abstract
The first investigation of the effect of mesa plated sidewall heatsinks on the performance of red oxide-confined verticalcavity surface-emitting lasers (VCSELs) is reported. Single mode (SMSR>20dB) visible (670 nm) VCSELs were fabricated with an AlGaInP active region and AlGaAs distributed Bragg reflectors (DBRs). Copper is electroplated on and around VCSELs with different mesa diameters with a variety of overlap sizes. A trend of reduction in thermal impedance for some devices has also been observed with increasing the plating overlap size.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rashid Safaisini, Klein Johnson, and Kevin L. Lear "Thermal resistance reduction in 670 nm vertical-cavity surface-emitting lasers", Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 76150L (5 February 2010); https://doi.org/10.1117/12.842693
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Cited by 1 scholarly publication.
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KEYWORDS
Vertical cavity surface emitting lasers

Plating

Resistance

Copper

Electroplating

Temperature metrology

Oxidation

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