Measurement method of multi-degree-freedom based on laser collimation principle

Liangen Yang; Xuanze Wang; Linli Long

doi:10.1117/12.867971

12 October 2010 Measurement method of multi-degree-freedom based on laser collimation principle

Liangen Yang, Xuanze Wang, Linli Long

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 765669 (2010) https://doi.org/10.1117/12.867971
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A five-degree-of-freedom (including two displace errors and three angular errors) online measuring system is proposed. Two mutually perpendicular prisms are fixed on a workbench of guideway and move along with the workbench. The measuring system consists of two independent left path and right path with same light structure and principle. The principle of displacement and angular measurement is analyzed, and optical structure is established. The system has many advantages such as small and simple structure, high-precision and cheap cost.

Citation Download Citation

Liangen Yang, Xuanze Wang, and Linli Long "Measurement method of multi-degree-freedom based on laser collimation principle", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765669 (12 October 2010); https://doi.org/10.1117/12.867971

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