Rapid ideal template creation for the inspection of MEMS based on self-similarity characteristics

Avinash Burla; Tobias Haist; Wolfram Lyda; Anto Yesuadimai Michael; Wolfgang Osten

doi:10.1117/12.860359

7 September 2010 Rapid ideal template creation for the inspection of MEMS based on self-similarity characteristics

Avinash Burla, Tobias Haist, Wolfram Lyda, Anto Yesuadimai Michael, Wolfgang Osten

Proceedings Volume 7798, Applications of Digital Image Processing XXXIII; 77981W (2010) https://doi.org/10.1117/12.860359
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Surface metrology of MEMS requires high resolution sensors due to their fine structures. An automated multiscale measurement system with multiple sensors at multiple scales enables fast acquisition of the surface data by utilizing high resolution sensors only at locations required. We propose a technique that depends on the fact that often MEMS have features (e.g. combs) repeating across the surface. These features can be segmented and fused to generate an ideal template. We present an automated similarity search approach based on feature detection, rotation invariant matching, and sum of absolute differences to find similar structures on the specimen. Then, similar segments are fused and replaced in the original image to generate an ideal template.

Citation Download Citation

Avinash Burla, Tobias Haist, Wolfram Lyda, Anto Yesuadimai Michael, and Wolfgang Osten "Rapid ideal template creation for the inspection of MEMS based on self-similarity characteristics", Proc. SPIE 7798, Applications of Digital Image Processing XXXIII, 77981W (7 September 2010); https://doi.org/10.1117/12.860359

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