Optimizing 1D bimorph actuated micromirrors by modifying actuating part geometry

Constantin Florin Comanescu; Catalin Tibeica; Munizer Purica; Paul Schiopu

doi:10.1117/12.882061

4 December 2010 Optimizing 1D bimorph actuated micromirrors by modifying actuating part geometry

Constantin Florin Comanescu, Catalin Tibeica, Munizer Purica, Paul Schiopu

Proceedings Volume 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V; 78212D (2010) https://doi.org/10.1117/12.882061
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, 2010, Constanta, Romania

Abstract

In this paper the results of the simulation for a bimorph actuated micromirror on silicon substrate are presented. The response of the micromirrors, consisting in the displacement along z axis was investigated in static and dynamic regimes using Coventor software taking into account the material parameters and geometry of the structure. The structure is made from two layers gold and silicon oxide. The gold layer of the structure is patterned in two parts, one actuating part and one reflecting part. Due to this patterning thermal conduction through the gold layer is interrupted and as a result the reflective surface curling is reduced, thus improving reflectivity. The simulations were carried out in order to obtain an optimized structure geometry. We optimized the actuating part geometry analyzing convection, radiation, von Misses stress, temperature and displacement. As a result we need an actuating part with almost constant temperature and von Misses stress and higher displacement. Also we made simulations in order to reduce the stress in the reflective surface.

Citation Download Citation

Constantin Florin Comanescu, Catalin Tibeica, Munizer Purica, and Paul Schiopu "Optimizing 1D bimorph actuated micromirrors by modifying actuating part geometry", Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78212D (4 December 2010); https://doi.org/10.1117/12.882061

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Actuators

Reflectivity

Micromirrors

Gold

Convection

Oxides

Silicon

Show All Keywords

Keywords/Phrases

Search In:

Publication Years