Large format x-ray image detector of high resolution and sensitivity

Jinchuan Guo; Bin Zhou; Xin Liu; Yaohu Lei; Qiang Yang; Hanben Niu; Yuncheng Wang; Xiaomei Kuo

doi:10.1117/12.870518

8 November 2010 Large format x-ray image detector of high resolution and sensitivity

Jinchuan Guo, Bin Zhou, Xin Liu, Yaohu Lei, Qiang Yang, Hanben Niu, Yuncheng Wang, Xiaomei Kuo

Proceedings Volume 7845, Optics in Health Care and Biomedical Optics IV; 78452M (2010) https://doi.org/10.1117/12.870518
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

X-ray phase contrast imaging technique that can be used as a practical diagnostic tool for medical purposes requires the image detector of higher resolution and sensitivity, and of larger format as well. The above mentioned parameters cannot be come to their best on one detector at present, so there is some kind of compromise among these parameters, for example, improving one parameter may be at the cost of impairing another one. This paper designed an x-ray image detector composed of a structured scintillation screen, optic taper and CCD camera etc. Photo-assisted electrochemical etching method was used to make an array of deep holes in the crystal silicon. The scintillator (CsI:Tl) was molten into the deep holes after the silicon wafer had been heat-oxidized. When the screen was coupled with CCD camera by optic taper, the detector fabrication was finished. We use the detector and an x-ray tube of 1mm focal spot to image a test pattern, the spatial resolution better than 20lp/mm was obtained under the x-ray tube voltage of 45kVp and current of 2mA. The total image pixel of this detector is 2048 x 2048, with the 13.5 micrometer pixel size of the camera. The ratio of the input face size of optic taper to output size was 2:1. High sensitivity was implemented by the course of x-rays in the scintillator, the longer the course, the more the x-ray was absorbed, and the higher the sensitivity. In our detector scintillation screen, the depth of the holes was great than 150 micrometers, with the 1.5 micrometers side length of the square section of a hole.

Citation Download Citation

Jinchuan Guo, Bin Zhou, Xin Liu, Yaohu Lei, Qiang Yang, Hanben Niu, Yuncheng Wang, and Xiaomei Kuo "Large format x-ray image detector of high resolution and sensitivity", Proc. SPIE 7845, Optics in Health Care and Biomedical Optics IV, 78452M (8 November 2010); https://doi.org/10.1117/12.870518

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KEYWORDS

Sensors

X-rays

Silicon

X-ray detectors

Scintillators

X-ray imaging

Scintillation

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