Paper
9 November 2010 Optical sensor based on fractal cantor multilayer structures made of porous silicong
Jia-qing Mo, Xiao-yi Lv, Zhen-hong Jia, Fu-ru Zhong, Jiang-wei Li, Fu-chun Zhang
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Abstract
We have designed and characterized a novel fractal Cantor multilayer porous silicon photonic crystal with a defect embedded in its middle as an optical sensor for sensing of various chemical and biological species. Compared with the common periodic structure one (such as Bragg) and some aperiodic structure (such as Thue-morse), it is more sensitive because of the lower number of interfaces. This research lays the foundation for design all-silicon sensor for biochemical sensing and can also be good applied in excellent filter.
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Jia-qing Mo, Xiao-yi Lv, Zhen-hong Jia, Fu-ru Zhong, Jiang-wei Li, and Fu-chun Zhang "Optical sensor based on fractal cantor multilayer structures made of porous silicong", Proc. SPIE 7853, Advanced Sensor Systems and Applications IV, 78532I (9 November 2010); https://doi.org/10.1117/12.869958
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KEYWORDS
Silicon

Refractive index

Multilayers

Optical sensors

Fractal analysis

Biosensing

Sensors

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