Sintering of solution-based nano-particles by a UV laser pulse train

Jie Zhang; Ming Li; Kiyoshi Morimoto

doi:10.1117/12.872007

21 February 2011 Sintering of solution-based nano-particles by a UV laser pulse train

Jie Zhang, Ming Li, Kiyoshi Morimoto

Proceedings Volume 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI; 79200I (2011) https://doi.org/10.1117/12.872007
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Sintering of palladium (Pd) and silicon (Si) nano-particles (NPs) by a 266nm laser pulse train on ink-printed films was investigated. Organic Pd-ink, and organic Si-ink were used as precursors. A high repetition rate DPSS laser (up to 300 kHz, 25ns, 266nm, Coherent AVIA series), which produces a ns pulse train with 3.3 μs -33.3 μs interval of pulse-topulse, was used as the heating source. Highly electrically conductive Pd (Resistivity=~150μΩ·cm) thin film on PET substrate and semi-conductive Si (Resistivity=~23kΩ·cm) thin film on glass substrate were successfully obtained with this laser pulse train sintering process. The sintered films were characterized by AFM, SEM, TEM and Raman spectroscopy, respectively. The pulse train heating process was also numerically simulated.

Citation Download Citation

Jie Zhang, Ming Li, and Kiyoshi Morimoto "Sintering of solution-based nano-particles by a UV laser pulse train", Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 79200I (21 February 2011); https://doi.org/10.1117/12.872007

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