IR photodetector based on an optically cooled micromirror as a light pressure sensor

Gennady P. Berman; Alan R. Bishop; Boris M. Chernobrod; Umar Mohideen

doi:10.1117/12.873646

10 February 2011 IR photodetector based on an optically cooled micromirror as a light pressure sensor

Gennady P. Berman, Alan R. Bishop, Boris M. Chernobrod, Umar Mohideen

Proceedings Volume 7926, Micromachining and Microfabrication Process Technology XVI; 792602 (2011) https://doi.org/10.1117/12.873646
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

We consider mid-infrared (5 - 25 μm), optically cooled detectors based on a microcantilever sensor of the radiation pressure. The significant enhancement of sensitivity is due the combination of low effective temperature (10 K), non-absorption detection and a high quality optical microcavity. Spectrometry applications are analyzed. It is shown that an optically cooled radiation pressure sensor potentially has an order of magnitude better sensitivity than the best conventional uncooled detectors.

Citation Download Citation

Gennady P. Berman, Alan R. Bishop, Boris M. Chernobrod, and Umar Mohideen "IR photodetector based on an optically cooled micromirror as a light pressure sensor", Proc. SPIE 7926, Micromachining and Microfabrication Process Technology XVI, 792602 (10 February 2011); https://doi.org/10.1117/12.873646

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