Open Access Paper
26 March 2011 Front Matter: Volume 7930
Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 793001 (2011) https://doi.org/10.1117/12.891493
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 7930, including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 7930", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 793001 (26 March 2011); https://doi.org/10.1117/12.891493
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KEYWORDS
Imaging systems

Microsystems

Photonic microstructures

Microopto electromechanical systems

Photonic crystals

Microelectromechanical systems

Photonic crystal devices

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